Measurement of SEM resolutions
收藏Mendeley Data2020-08-06 更新2026-04-09 收录
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https://data.mendeley.com/datasets/b2nysxzn69
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资源简介：
This is a data reference for the measurement of an SEM resolution. The dataset includes a raw SEM image, RoI files for indicating measured positions, output files of profile and log data, and a result file with a summary of the measurements. Files SEMresolution.pdf: Describe the file information, software, and method Fig7b_SEMraw.tif: Raw data of the SEM image in Fig.7b RoI.zip: Region of interest files “NoXX.roi” for ImageJ program ProfileLog.zip: Output files of profile and log data with ImageJ Result.xlsx: Summary of measurement results with ImageJ
创建时间：
2020-08-06
