Random Phase Plate Designed by Genetic Algorithm for Decoherence in Energy Homogenization Units of Photolithography Illumination System
收藏科学数据银行2024-09-25 更新2026-04-23 收录
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https://www.scidb.cn/detail?dataSetId=6afc3d26bb5141d08d871b1699984a1c
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资源简介：
This dataset contains the phase distribution of the random phase plate(RPP) which designed to eliminate the interference patterns caused by the coherence of the light source. The size of RPP is 25mm×25mm, the number of RPP is 50×50 and the pitches of RPP is 0.5mm×0.5mm.
提供机构：
Sikun Li; Jiahong Liu; Huijie Huang; Shanghai Institute of Optics and Fine Mechanics
创建时间：
2024-08-23
