Random Phase Plate Designed by Genetic Algorithm for Decoherence in Energy Homogenization Units of Photolithography Illumination System

This dataset contains the phase distribution of the random phase plate(RPP) which designed to eliminate the interference patterns caused by the coherence of the light source. The size of RPP is 25mm×25mm, the number of RPP is 50×50 and the pitches of RPP is 0.5mm×0.5mm.