Flat thin films forward simulations (Complex fresnel rs and rp). Rough thin film of sio2, sweeped in thickness about 1micron (Intensity and raw rs and rp.) Both as measured with 0 to NA = 0.9 angles.

This dataset is part of a project under the ATMOC consortium, involving case studies of various simple one-material layers and their optical properties, particularly focusing on their interaction with light in terms of reflectivity. It encompasses samples , studied by institutions like UT Twente, IMEC, and CEA. These samples include flat  surfaces coated with materials like Si, Mo, Ru, Al, Ru, Ni, Mo, Nb, Pt, Ta, Cr, TiN, and  and rough thermal SiO2 on Si wafers, with thicknesses ranging from a few nanometers to several micrometers, applied through processes like PVD deposition and thermal oxidation at high temperatures.

The dataset leverages refractive index data from the online resource "refractiveindex.info" to simulate the optical properties of these layers. The reflection of light is primarily determined by the Fresnel reflection coefficient, with additional simulations for rough surfaces using JCMWave's Finite Element Method (FEM) to understand the effects of surface roughness on light reflection. Primary setup it represents is prototype of Coherent Fourier Scatterometry (typically used for critical parameters of grating reconstruction|).

Data are stored in .mat and .csv formats, with MATLAB scripts for generating visualizations of the model results, such as pcolor plots of intensity reflections based on variables like cover thickness and k-axis normalization. Python examples are also provided for loading and visualizing the data. The datasets aim to offer a comprehensive understanding of the optical properties of these materials and structures, supporting the development of standards and models for optical measurements and applications. Additionally, the dataset includes references to further studies and methodologies, such as the T-matrix approach and the Fabry-Perot formula extension, indicating a scholarly foundation in optical physics and engineering research.