Scanning Precession Electron Tomography (SPET) for Structural Analysis of Thin Films along Their Thickness

_______________________________________________________________________________ | General information: |_______________________________________________________________________________ | Article | Scanning Precession Electron Tomography (SPET) for Structural Analysis | | of Thin Films along Their Thickness | | Authors | Sara Passuti, Julien Varignon, Adrian David, Philippe Boullay | | Journal | Symmetry 2023, 15, 1459 | | DOI | 10.3390/sym15071459 | | Funding | NanED (www.naned.eu)(ESR project 12) | | Project Label | PVO_STO | | Sample Label | PVO_STO | | Dataset description | SPET (scanning precession electron tomography) acquisition on | | the PVO thin film deposited on STO substrate, analyzed in section | | in the form of a TEM lamella. In the main folder the datasets | | corresponding to each one of the analyzed areas of the | | sample at different thicknesses (i.e. distances from the | | interface with the substrate) is found. |______________________________________________________________________________ | Experimental |_______________________________________________________________________________ | Data Type | Electron diffraction data - 3D ED | | Data collection method | SPET (Scanning Precession Electron Tomography) | | Number of experimental frames | 57 | | tilt range | -50.7° to +43.5° | | Exposure time per frame | 500 ms | | Software used for the data collection | ASI Accos |______________________________________________________________________________ | Instrumental: | |_______________________________________________________________________________| | Instrument | Transmission electron microscope | | Jeol F200 | Radiation source | cold FEG | | Accelerating voltage | 200 kV | | Wavelength | 0.0251 Å | | Probe Type | Microdiffraction | | Beam Diameter | 10 nm | | Beam Convergence | Parallel beam, convergence <0.1mrad | | Detector | Hybrid pixel detector ASI Cheetah M3 | | Number of pixels in the image | 512 x 512 | | Pixel size | 55 µm x 55 µm | | Effective camera length | 200 mm | | Calibration constant | 0.00708 Å-1/pixel |______________________________________________________________________________ | Sample description: |_______________________________________________________________________________ | Name | PVO thin film on STO substrate | | at thickness = 0.52 nm | | film deposited by SPS and cut by FIB | | Chemical composition | PrVO3, SrTiO3 | | Number of crystals contributing | 1 | to the data set |______________________________________________________________________________ | Authorship and bibliography |_______________________________________________________________________________ | Author of the data | Sara Passuti (ESR 12) | | Related data | |______________________________________________________________________________ | Files and data formats |_______________________________________________________________________________ | Image format | tiff_16bit | | Folders/files | layer_#1_0.52_nm | | layer_#2_3.28_nm | | layer_#3_4.20_nm | | layer_#4_5.12_nm | | layer_#5_7.88_nm | | layer_#6_9.72_nm | | layer_#7_12.48_nm | | layer_#8_17.08_nm | | layer_#9_29.08_nm | | substrate | | each of the folders contains the respective "tiff" folder containing | | the diffraction patterns in tiff format and the files for the analysis, | | as well as the metadata file with the specific information of the | | dataset ______________________________________________________________________________ Notes: _______________________________________________________________________________