Data for publication titled "Effect of ion irradiation on superconducting thin films"

Here is the data to support the findings in the article titled "Effect of ion irradiation on superconducting thin films". There is a .txt file showing the room temperature sheet resistance measurement results for different wafers (measured by a four point probe in multiple positions of the wafer and the value in the table is the average of those measurements). The .csv files show resistance of the films scaled by the room temperature resistance value (R_RT) as a function of temperature. The first column is temperature (K) and the second column is R(T)/R_RT. For some wafers, there are multiple measurement results, labeled _a/_b/_c. The TEM images are the .tif files and FFT graphs derived from some of the TEM images are shared as .png files (titles show which TEM image has been used). EDS data is also shared for some wafers. The corresponding wafer is in the file names, and the data contains a .rpl, a .raw and a .png file with same main names.