Supporting Data for Selected Area Electron Beam Induced Deposition of Pt and W for EBSD Backgrounds

Name: Supporting Data for Selected Area Electron Beam Induced Deposition of Pt and W for EBSD Backgrounds
Creator: National Institute of Standards and Technology
Published: 2018-11-06T20:19:36+08:00

DataCite Commons2024-09-24 更新2025-04-16 收录

电子背散射衍射表征

电子束诱导沉积

数据链接：

https://data.nist.gov/od/id/77D21EEB60F37A2BE053245706819FDB1978 数据链接链接失效反馈

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资源简介：

These are the unprocessed electron back scatter diffraction patterns (EBSPs) collected from the mesas of electron beam induced deposition (EBID) material, in addition to the Mathematica notebook used to process the images. Each of the 12 EBID mesa has 10 EBSPs collected at 20 kV and 10 kV, in addition to several longer line scans that step from the silicon substrate onto the EBID mesa.

提供机构：

National Institute of Standards and Technology

创建时间：

2018-11-06