Accurate determination of matrix composition in semiconductor material using MS-SIMS and ToF-SIMS methods

Name: Accurate determination of matrix composition in semiconductor material using MS-SIMS and ToF-SIMS methods
Creator: Institute of Physics, Polish Academy of Sciences
Published: 2025-03-07T12:44:58+08:00

RepOD Repository for Open Data2025-03-07 更新2026-07-23 收录

半导体材料成分分析

ToF-SIMS质谱分析

数据链接：

https://repod.icm.edu.pl/dataset.xhtml?persistentId=doi:10.18150/GXIUUO 数据链接链接失效反馈

官方服务：

资源简介：

Przeździecka, Ewa, 2025, "Accurate determination of matrix composition in semiconductor material using MS-SIMS and ToF-SIMS methods", https://doi.org/10.18150/GXIUUO, RepOD, V1

提供机构：

Institute of Physics, Polish Academy of Sciences

创建时间：

2025-03-07