"Synthetic Die-to-Database (D2DB) Lithography Layout Dataset"
收藏DataCite Commons2025-12-07 更新2026-05-03 收录
下载链接：
https://ieee-dataport.org/documents/synthetic-die-database-d2db-lithography-layout-dataset
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资源简介：
"This dataset contains 20,000 synthetic 128\u00d7128 layout-style images for D2DB inspection research. Each sample includes a binary CAD image (lines, rectangles, vias), a physics-rendered lithography-style image, and a SEM-like noisy image. Three classes are provided: clean (no defect), geom_var (geometric\/process variation only), and topo_defect (true topological defects: bridge, open, missing_via). Metadata (metadata.csv) lists ID, split (train\/val\/test), class, defect_type, and paths to cad\/physics\/sem PNGs. Generated with the accompanying Python script using only common libraries (numpy, OpenCV, Pillow, pandas). Suitable for benchmarking die-to-database and defect detection methods without proprietary layout data."
提供机构：
IEEE DataPort
创建时间：
2025-12-07
