High energy X-ray characterization of interfaces for quantum application

Small layered junctions, crucial for quantum applications, consist of thin films, often conductors or superconductors, separated by oxide layers. Despite their significance, characterizing these structures is challenging due to their small size and complex compositions. Traditional techniques like SEM and TEM offer limited insights and may damage samples. While X-ray Reflectivity (XRR) provides useful out-of-plane electron density profiles, it lacks in-plane spatial resolution. This proposal introduces High Energy XRR Tomography (HEXRR-Tomo) to overcome this limitation. Unlike conventional XRR, HEXRR-Tomo enables spatial mapping of the entire surface, facilitating high-resolution 3D electron density map reconstruction. This non-destructive technique promises insights into layer thickness, density, and roughness, advancing understanding of junction structure and properties.