Molecular dynamics simulation data of thin film deposition at Ti Si interface and first principles calculation data of surface adsorption energy
收藏DataCite Commons2025-04-27 更新2025-04-16 收录
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资源简介:
This dataset contains two parts: one is the file and analysis results of molecular dynamics used to control the simulation of Ti Si thin film deposition behavior, and the other is the file and analysis results used to control the first principles calculation of Ti adsorption behavior on Si (100) surface.
提供机构:
Science Data Bank
创建时间:
2025-04-10



