Mid-infrared quantum optics in silicon supporting data

Applied quantum optics stands to revolutionise many aspects of information technology, provided performance can be maintained when scaled up. Silicon quantum photonics satisfies the scaling requirements of miniaturisation and manufacturability, but at 1.55 μm it suffers from problematic linear and nonlinear loss. Here we show that, by translating silicon quantum photonics to the mid-infrared, a new quantum optics platform is created which can simultaneously maximise manufacturability and miniaturisation, while reducing loss. We demonstrate the necessary platform components: photon-pair generation, single-photon detection, and high-visibility quantum interference, all at wavelengths beyond 2 μm. Across various regimes, we observe a maximum net coincidence rate of 448±12Hz, a coincidence-to-accidental ratio of 25.7±1.1, and a net two-photon quantum interference visibility of 0.993±0.017. Mid-infrared silicon quantum photonics will bring new quantum applications within reach.