Dataset related to "Atomic Force Microscope with an Adjustable Probe Direction and Integrated Sensing and Actuation"
收藏资源简介：
These original measurement data relate to the publication: J. Schaude, T. Hausotte: Atomic Force Microscope with an Adjustable Probe Direction and Integrated Sensing and Actuation, Nanomanufacturing and Metrology 5, pp. 519-148, https://doi.org/10.1007/s41871-022-00143-9. Please refer to this open access publication for a detailed description of the measurement setup and procedure. All data are in ASCII-format. Each file contains six columns, where column one to three are the <em>x</em>, <em>y</em>, and <em>z</em>-coordinates of the positioning system, column four is the demodulated signal of the AFM (<em>R</em><sub>AFM</sub>) and columns five and six are the raw signals of the <em>z</em>-interferometer (<em>Q</em><sub>A</sub> and <em>Q</em><sub>B</sub>). <strong>Content of the folders</strong> 10_Calibrations: Repeated calibration of the AFM against the <em>z</em>-interferometer of the NMM-1. 20_Standstill-Measurements: Three standstill measurements for 90 s each. 30_Long-Term-Precision: Standstill measurements for 15 s every 10 min for in sum 18 hours. 40_Scans: Repeated closed-loop scans on a calibration grating. 50_SINCOS: Repeated movement of the stage in z-direction for 2 µm with the cantilever being in free air just before the sample. <strong>Acknowledgement</strong> This project was funded by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) –TRR 285 -Project-ID 418701707, subproject C05
