Dataset for Review of MEMS for photonic integrated circuits: table for reported key figures
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资源简介：
The following dataset summarizes key figures in reported photonic MEMS devices. The data was used to categorize devices, define and plot key figures of merit relevant to the field of photonic MEMS for scalable integrated circuits, as discussed in the invited review article MEMS for Photonic Integrated Circuits.
创建时间：
2019-09-19
