Deposition of highly crystalline AlScN thin films using synchronized high-power impulse magnetron sputtering: From combinatorial screening to piezoelectric devices
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Full data set for the following publication: Deposition of highly crystalline AlScN thin films using synchronized high-power impulse magnetronsputtering: From combinatorial screening to piezoelectric devicesJyotish Patidar, Kerstin Thorwarth, Thorsten Schmitz-Kempen, Roland Kessels, and Sebastian Siol PHYSICAL REVIEW MATERIALS 8, 095001 (2024)
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Empa创建时间：
2025-04-04
