Optical measuring transducer SiN_300x750 and 300x1000.xlsx
收藏Figshare2023-03-27 更新2026-04-08 收录
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https://figshare.com/articles/dataset/Optical_measuring_transducer_SiN_300x750_and_300x1000_xlsx/22340416/1
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资源简介：
Functional schemes dataset for article "An Optical Measuring Transducer for a Microoptoelectromechanical Micro–g Accelerometer Based on the Optical Tunneling Effect"
提供机构：
Nesterenko, Tamara; Shesterikov, Evgeniy; Koleda, Aleksei; Kulinich, Ivan; Barbin, Evgenij; Kokolov, Andrey
创建时间：
2023-03-27
