Data publication: Prediction of laser-induced breakdown in sub-micron-thick d...

This dataset contains all source data used to generate figures and all other findings of the publication: "Prediction of laser-induced breakdown in sub-micron-thick dielectric...本数据集包含生成该学术论文所有配图及支撑其所有其他研究发现所需的全部源数据，对应学术论文的标题为：《亚微米厚度电介质（sub-micron-thick dielectric）中激光诱导击穿（laser-induced breakdown）的预测》"Prediction of laser-induced breakdown in sub-micron-thick dielectric..."