Model of AlN substrate;Tersoff potential;Cfg files of finally deposited AlN film from Molecular dynamics simulation of AlN deposition: temperature and N : Al ratio effects
收藏The Royal Society Figshare2024-02-06 更新2026-04-17 收录
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https://rs.figshare.com/articles/dataset/Model_of_AlN_substrate_Tersoff_potential_Cfg_files_of_finally_deposited_AlN_film_from_Molecular_dynamics_simulation_of_AlN_deposition_temperature_and_N_Al_ratio_effects/6882032/1
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资源简介：
10800aln.data;AlN.tersoff
提供机构：
Liu, Sheng; Zhang, Libin; Gan, Zhiyin; Zhu, Guo; Yan, Han
创建时间：
2018-07-31
