Model of AlN substrate;Tersoff potential;Cfg files of finally deposited AlN film from Molecular dynamics simulation of AlN deposition: temperature and N : Al ratio effects

Name: Model of AlN substrate;Tersoff potential;Cfg files of finally deposited AlN film from Molecular dynamics simulation of AlN deposition: temperature and N : Al ratio effects
Creator: Liu, Sheng; Zhang, Libin; Gan, Zhiyin; Zhu, Guo; Yan, Han
Published: 2018-07-31T00:00:00+08:00