Data for: Chemical profiles of the oxides on tantalum in state of the art superconducting circuits

Experimental data and fitted parameter values presented in manuscript titled "Chemical profiles of the oxides on tantalum in state of the art superconducting circuits" by R. A. McLellan, A. Dutta, et al. Each csv file in the root folder contains fitted parameters or background correct data. Zip files contain raw data for both the sample being studied and reference samples of Au or Ag.