Data of TALIF measurements of hydrogen and deuterium surface loss probabilities on quartz in low pressure high density plasmas
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This article deals with surface loss on quartz of atomic hydrogen (H) and its isotope deuterium(D) in a low-pressure (10 Pa) pulsed inductively coupled plasma. The atomic temporal decayin the post discharge is measured by two-photon absorption laser-induced fluorescence(TALIF). From the loss rate, the atomic surface loss probability is determined. In purehydrogen or pure deuterium gas, no isotopic effect on surface kinetics has been observed andthe surface loss probabilities of H and D were found to be almost identical and equal to∼1.8%. However, despite the lack of difference in surface loss probability, a net isotopic effecton surface loss rate due to the mass difference between the isotopes is measured. Hydrogenatoms diffuse faster and have higher flux to the plasma chamber walls than deuterium atoms.Hydrogen atoms are therefore lost at higher rate than deuterium atoms. Based on the observedisotopic difference and on the comparison between H and D TALIF signals, the isotopiceffects on H and D atom production are discussed.



