Ar+ and N+ ion irradiated Co/Pt and Pt/Co bilayered stacks

This dataset comprises X-ray diffraction (XRD), secondary ion mass spectrometry (SIMS), and vibrating sample magnetometry (VSM) data obtained from the study of thin-film structures. The films are composed of cobalt (Co) and platinum (Pt) layers with configurations Co(10 nm)/Pt(10 nm)/substrate and Pt(10 nm)/Co(10 nm)/substrate. Both types of films were fabricated by magnetron sputtering deposition at room temperature onto Si(001)/SiO2 substrates. The as-deposited samples were subjected to N+ and Ar+ ion irradiation using a BALZERS MPB 202 ion implanter system with the ion energy of 110 keV and ion dose 1 × 1015 ions/cm2. The irradiated stacks were post-annealed in vacuum of 10−6 mbar at 550°С for 30 min and investigated along with non-irradiated samples after same single-stage thermal treatment. The XRD data, obtained using a Rigaku Ultima IV diffractometer (CuKα radiation), provides information on the crystal structure of the films. SIMS data, acquired with an Ion ToF IV device, reveals depth profiles and elemental composition, while the magnetic properties of the films were characterized using a vibrating sample magnetometer (VSM).