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Data for: Investigation of c-Si surface passivation using thermal ALD deposited HfO2 films

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Mendeley Data2026-04-18 收录
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These data provide the curves of effective lifetimes as measured in our ALD samples in different thermal annealing conditions. As set of C-V data were used to extract the Dit and Qf values for the thin dielectric film.

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2019-02-15
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