The data of article ''Phase diagram of thin films of lutetium hydride - lutetium''

The data related to the article “Phase diagram of thin films of lutetium hydride - lutetium” published in the journal Chinese Physics B. In this paper, we present the deposition and systematic characterizations of lutetium hydride LuH𝑥 thin films.The hydrogen content 𝑥 can be boosted up to 3.2 in the nominal formula, i.e., LuH3.2. With 𝑥 increasing, the films undergo a structural phase transition from hexagonal close-packed (hcp) to face-centered cubic (fcc) structures: (1) the hcp single-phase region persists with 𝑥 from 0 up to 0.77; (2) the hcp-phase and fcc-phase coexist in the two-phase region with 𝑥 from 0.77 to 1.8; (3) the fcc single-phase region persists with 𝑥 from 1.8 up to 3.2.The temperature-dependent anomalies of resistivity at ∼173 Kelvin were observed at ambient pressure, which is observed in the lutetium hydride thin films for the first time experimentally.The data contain an Excel file, which includes the hydrogen pressure during deposition, H content 𝑥, crystal structure, lattice constant a in the hcp phase, lattice constant c in the hcp phase, lattice constant a in the fcc phase, resistivity anomaly kink temperature, resistivity lower anomaly critical point, and resistivity higher anomaly critical point of LuH𝑥 thin films.