Data accompanying the publication: Utilizing focused field as a probe for shape determination of subwavelength structures via coherent Fourier scatterometry

Authors (publication): Anubhav Paul, Robin Wever, Sarika Soman, Silvania F. Pereira<br>This dataset contains the raw and processed data, together with analysis scripts/helper functions, supporting the results reported in the publication “Utilizing focused field as a probe for shape determination of subwavelength structures via coherent Fourier scatterometry”. It includes datasets from coherent Fourier scatterometry (CFS) far-field signatures acquired under tightly focused illumination (λ = 633 nm) for nanopillars with different geometries (cylindrical, triangular, square, and rectangular) and multiple orientations, as well as corresponding 3D FDTD simulation outputs used for direct comparison with experiments. The dataset includes processed results derived from these far-field measurements/simulations, such as the rotation-dependent correlation metric used to identify shape-specific periodic signatures, and parameter-sweep data used in the paper’s limitation analyses (e.g., lateral dimension, height dependence, and robustness to shape distortions such as edge roundness). The dataset is organized to enable reproducibility of the reported figures and can be reused for related research on subwavelength shape characterization and optical metrology using focused-field scatterometry.