Scanning electron microscope measurements of selected sub-pattern feature dimensions on patterned Ti and Si substrates, including grating groove width, ridge width, and pitch (i.e. groove width + ridge width).
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https://figshare.com/articles/dataset/_Scanning_electron_microscope_measurements_of_selected_sub_pattern_feature_dimensions_on_patterned_Ti_and_Si_substrates_including_grating_groove_width_ridge_width_and_pitch_i_e_groove_width_ridge_width_/1223543
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Data = mean ± standard deviation (n = 5).Scanning electron microscope measurements of selected sub-pattern feature dimensions on patterned Ti and Si substrates, including grating groove width, ridge width, and pitch (i.e. groove width + ridge width).
创建时间：
2015-12-02
