Facile fabrication of THz metasurfaces by a spatially shaped femtosecond laser printing system

Terahertz (THz) metasurfaces provide unprecedented abilities to realize versatile THz wavefronts manipulations. Nevertheless, these high degree of freedom, non-periodic, densely arranged subwavelength unit cells pose numerous extreme parameter requirements for the fabrication of metasurfaces, presenting significant challenges to their practical application. Herein, a spatial shaping femtosecond laser printing system, based on spatial light modulation (SLM), is proposed for the creation of THz metasurfaces. Through programming the SLM with a sequence of computer-generated holograms (CGH) corresponding to C-shaped Bessel beams with varying opening angles and orientation angles, the C-shaped slit resonant rings with different geometric parameters—fundamental units of the metasurface—were precisely printed onto a gold film. To validate this technique, a THz metalens based on a phased gradient design and a THz holographic plate employing simultaneous phase and amplitude modulation were meticulously fabricated, displaying outstanding performance. Owing to the simple processing f low, high reproducibility, and wide applicability of materials, this technique stands out as a versatile and efficient approach for fabricating THz metasurfaces, with the potential to promote the commercialization of terahertz metasurfaces.