Aerial image data measured by lithography tools
收藏Mendeley Data2023-02-18 更新2024-06-30 收录
下载链接：
https://www.doi.org/10.57760/sciencedb.07463
下载链接
链接失效反馈官方服务：
资源简介：
Use the aerial image sensor integrated on the worktable to collect the aerial images marked by 0 ° and 90 ° masks. Repeat acquisition for three times for each view point.
创建时间：
2023-02-18
