在透射电镜内部原位电学观察和测量

运用原位透射电镜技术实时观察微纳电子器件在电场作用下原子尺度的微结构演化过程对深入理解其工作机理和器件失效原因具有重要的意义。针对这一难点课题，我们通过优化FIB原位样品制备工艺，结合原位电学样品杆，在球差电镜内实现了铪基铁电电容器在原位电场作用下相变过程的原子尺度观察，为铪基铁电器件的结构和性能优化指明了方向。Real-time observation of atomic-scale microstructural evolution of micro-nano electronic devices under applied electric fields via in-situ transmission electron microscopy (TEM) is critically important for gaining in-depth insights into their operating mechanisms and the root causes of device failure. To address this challenging research topic, we optimized the focused ion beam (FIB) in-situ sample preparation process, combined with an in-situ electrical sample holder, and successfully achieved atomic-scale observation of the phase transition process of hafnium-based ferroelectric capacitors under in-situ electric fields inside an aberration-corrected TEM. This work provides clear guidance for the structural and performance optimization of hafnium-based ferroelectric devices.

搜集汇总

背景与挑战

背景概述

该数据集聚焦于运用原位透射电镜技术，在电场条件下对微纳电子器件进行原子尺度的实时观察和测量，特别针对铪基铁电电容器的相变过程。它通过优化FIB原位样品制备工艺，结合原位电学样品杆，在球差电镜中实现了高分辨率的微结构演化分析，为材料科学领域，尤其是铁电器件的性能优化提供了关键实验数据。数据集由华东师范大学发布，属于国家重点研发计划项目的一部分，包含19个文件，总数据量242.25MB。