Deep Learning Modeling of Oxygen Redistribution and Thermal Transport in Silicon on Insulator and Buried Oxide Layers
收藏DataCite Commons2026-03-08 更新2025-09-08 收录
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https://figshare.com/articles/dataset/Deep_Learning-Driven_Modeling_of_Oxygen_Redistribution_and_Thermal_Transport_in_Silicon-on-Insulator_and_Buried-Oxide_Layers_for_SIMOX_processDeep_Learning-Driven_Modeling_of_Oxygen_Redistribution_and_Thermal_Transport_in_Silicon-on-Insulat/29422061
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资源简介：
Data and code supporting the key findings of “Deep Learning-Driven Modeling of Oxygen Redistribution and Thermal Transport in Silicon-on-Insulator and Buried-Oxide Layers for SIMOX process”.
提供机构：
figshare
创建时间：
2025-06-27
