Deep Learning Modeling of Oxygen Redistribution and Thermal Transport in Silicon on Insulator and Buried Oxide Layers
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Data and code supporting the key findings of “Deep Learning-Driven Modeling of Oxygen Redistribution and Thermal Transport in Silicon-on-Insulator and Buried-Oxide Layers for SIMOX process”.
支撑论文《面向SIMOX工艺的绝缘体上硅(Silicon-on-Insulator)与埋氧层(Buried-Oxide Layers)内氧再分布及热输运的深度学习驱动建模》核心研究结论的相关数据与代码
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figshare创建时间:
2025-06-27



