Data repository for "Extreme Ultraviolet induced reactions of tin-oxo cage photoresists"

Data repository for "Extreme Ultraviolet induced reactions of tin-oxo cage photoresists" by Najmeh Sadegh, Jarich Haitjema, Yu Zhang, Lianjia Wu, Olivier Lugier, Ivan Bespalov, Dimitrios Kazazis, Michaela Vockenhuber, Yasin Ekinci, Katharina Witte, Benjamin Watts, Ivan Pollentier, Danilo De Simone, Albert M. BrouwerJournal of Materials Chemistry C, 2026, DOI: 10.1039/D5TC04167HAvailable data are organized according to the figures in the publication. Each folder inside the folder Data in figures contains the data that can be used to reproduce each of the individual figures. The excel file RGA_spectra_TinOH_TinF.xlsx is used for Figures 5, S7 and S9. The xyz files in folder xyz structure files correspond to the energy data in Table S3.