硅湿法刻蚀仿真及测试

该数据集主要是收集硅湿法刻蚀工艺仿真数据及实验验证的相关数据，模型获取主要是来源于江苏英特神斯科技有限公司在项目研发过程中收集的实验资料，以及东南大学做的工艺试验验证数据，对比两者特定数据，通过Intellisuite仿真软件进行仿真处理，确定达到项目考核指标，对增加Intellisuite仿真软件数据库数据，提高Intellisuite仿真软件计算能力的精确度、准确度、时效性有验证作用。总体数据集约600M，主要支撑项目课题1以及课题3的研究数据收集整理工作。

This dataset primarily collects simulation and experimental validation data for silicon wet etching processes. The data sources include experimental materials gathered by Jiangsu Intersyn Technology Co., Ltd. during project R&D, as well as process test verification data obtained from Southeast University. By comparing the specific datasets from the two sources and performing simulation processing using the Intellisuite simulation software, it is verified that the data meets the project's assessment criteria. This dataset also serves to validate the effectiveness of expanding the Intellisuite simulation software's database and improving its computational precision, accuracy, and timeliness. The total size of the dataset is approximately 600 MB, and it mainly supports the data collection and organization work for Project Topics 1 and 3.

搜集汇总

背景与挑战

背景概述

该数据集主要包含硅湿法刻蚀工艺的仿真数据及实验验证数据，来源于江苏英特神斯科技有限公司的项目研发数据和东南大学的工艺试验验证数据，通过Intellisuite仿真软件处理，用于提高仿真软件的精确度和准确度。数据集总量为2.86GB，包含9个文件，支撑国家重点研发计划项目的研究。