Supporting Data for the article "Improving UV Stability of SiO2/SiNx-Passivated Silicon Photodiodes Through Shallow Junction Implantation and Oxide Regrowth"
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Data sets supporting the article: Improving UV Stability of SiO2/SiNx-Passivated Silicon Photodiodes Through Shallow Junction Implantation and Oxide Regrowth.
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Zenodo创建时间：
2026-05-28
