Data for publication: Monolithic 4H-SiC nanomechanical resonators with high intrinsic quality factors
收藏官方服务：
资源简介：
These are experimental data that form the base of our publication: Monolithic 4H-SiC nanomechanical resonators with high intrinsic quality factors
提供机构：
Zenodo创建时间：
2025-07-23
