Accurate determination of matrix composition in semiconductor material using MS-SIMS and ToF-SIMS methods

Name: Accurate determination of matrix composition in semiconductor material using MS-SIMS and ToF-SIMS methods
Creator: Institute of Physics, Polish Academy of Sciences
Published: 2025-03-07T12:45:21+08:00

RepOD Repository for Open Data2025-03-07 更新2026-07-23 收录

半导体材料成分分析

二次离子质谱应用

数据链接：

https://repod.icm.edu.pl/dataset.xhtml?persistentId=doi:10.18150/6P7UDJ 数据链接链接失效反馈

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资源简介：

Zeinab Khosravizade; Małgorzata Trzyna-Sowa; Lysak, Anastasiia; Ewa Przeździecka; Rafał Jakieła, 2025, "Accurate determination of matrix composition in semiconductor material using MS-SIMS and ToF-SIMS methods", https://doi.org/10.18150/6P7UDJ, RepOD, V1

提供机构：

Institute of Physics, Polish Academy of Sciences

创建时间：

2025-03-07