Data from: 17 GHz lossless InP-membrane active metasurface

High-speed active metasurfaces enable spatiotemporal light control within
an ultra-thin device layer, offering new possibilities for optical
communication, sensing, and computing. However, a tradeoff between
electrical conductivity and optical loss has hindered the realization of a
high-speed, low-loss device. Here, we experimentally demonstrate an active
metasurface operating at 1.5-μm wavelength range that achieves a
record-high 17.5 GHz modulation bandwidth while maintaining a high quality
(Q) factor of 102 and ultra-low optical loss of 0.56 dB. This is enabled
by the indium phosphide (InP) membrane platform, where n-InP offers high
electron mobility and low free-carrier absorption simultaneously. A high-Q
Friedrich-Wintgen quasi-bound-state-in-the-continuum mode within the
InP-membrane high-contrast grating (InP HCG) traps light in the organic
electro-optic material for efficient modulation. The InP HCG also
functions as an ultralow-resistance interdigitated electrode, enabling
50-fold faster modulation than silicon-based counterparts. Our work paves
the way towards active metasurfaces for high-speed spatiotemporal light
control beyond the