Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors (Data)

Name: Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors (Data)
Creator: Bertke, Maik; Nyang'au, Wilson Ombati; Wasisto, Hutomo Suryo; Fahrbach, Michael; Xu, Jiushuai; Peiner, Erwin; Hamdana, Gerry; Setiono, Andi
Published: 2021-11-23T00:00:00+08:00

Zenodo2021-11-23 更新2026-04-07 收录

MEMS谐振传感器

相位优化

数据链接：

https://zenodo.org/record/5720485 数据链接链接失效反馈

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资源简介：

Origin projects, figures and COMSOL simulation used for the article "Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors", published in <em>Journal of Sensors and Sensor Systems </em>on 14 Jan 2019.

提供机构：

Bertke, Maik; Nyang'au, Wilson Ombati; Wasisto, Hutomo Suryo; Fahrbach, Michael; Xu, Jiushuai; Peiner, Erwin; Hamdana, Gerry; Setiono, Andi

创建时间：

2021-11-23