陀螺仪、加速度计、风向风速传感器有限元仿真
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陀螺仪、加速度计、风向风速传感器有限元仿真数据集主要面向上述器件的结构研发。通过有限元分析更容易找到影响MEMS器件性能的关键结构参数,用于指导设计,完成结构优化;以最小的成本来缩短设计周期。该数据集分为COMSOL和Intellisuite有限元仿真模块的仿真过程文件及结果文件;主要记录器件的仿真结果:谐振频率与模态阵型,需要满足课题指标,即:系统级仿真与实验偏差优于10%;数据量为1.46GB
This finite element simulation dataset for gyroscopes, accelerometers, and wind direction and speed sensors is primarily designed for the structural R&D of these devices. Through finite element analysis, researchers can more easily identify the key structural parameters affecting MEMS device performance, so as to guide design, complete structural optimization, and shorten the design cycle at the lowest possible cost. This dataset contains simulation process files and result files from the finite element simulation modules of COMSOL and Intellisuite. It mainly records the device simulation results: resonant frequency and mode shapes, which must meet the project requirements, i.e., the deviation between system-level simulation and experimental results should be less than 10%. The total data size of the dataset is 1.46 GB.




