Angle Monitor of Micromirror Array for Freeform Illumination in Lithography Systems
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资源简介：
In this paper, we propose an angle monitor to ensure the high-precision tilting of thousands of biaxialmicromirrors. As one of the critical modules for closed-loop control of the two-dimensional micromirror array, the online monitor feeds the monitored high-precision tilt angle back to the processing system. The angle monitor mainly consists of the spot scanning module and the angle detection module.
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Science Data Bank创建时间：
2024-02-01
