Frequency-Agile Matching of Inductively Coupled Plasmas (Data)

Datasets correspond to data used/presented in the open-access paper: T. Lafleur, R. Shaik, G. Bowden, D. Petty, and C. Corr, "Frequency-Agile Matching of Inductively Coupled Plasmas", Plasma Sources Science and Technology, accepted (2026) Specific files correspond to the data presented in the relevant figures of the above paper: Sweep_Prf_56ugs.xlsx: Data for the thruster at a fixed mass flow rate of 56 ug/s and different powers. The columns indicate different system properties. Used in Figures 3 and 4. Sweep_mdot_7W.xlsx: Data for the thruster at a fixed power of 7 W and different mass flow rates. The columns indicate different system properties. Used in Figures 3 and 4. Sweep_freq_56ugs_7W.xlsx: Data for the thruster at a fixed power and mass flow rate of 7 W and 56 ug/s respectively, and different frequencies. The columns indicate different system properties. Used in Figure 5. Agile_Sweep_Prf_56ugs.xlsx: Data for the thruster at a fixed mass flow rate of 56 ug/s and different powers, and with frequency-agile matching used. The columns indicate different system properties. Used in Figure 6. Agile_Sweep_Prf_56ugs_Fixed.xlsx: Data for the thruster at a fixed mass flow rate of 56 ug/s and different powers, and with the frequency fixed. The columns indicate different system properties. Used in Figure 6. Sweep_2D.xlsx: Data for the thruster at difference powers and mass flow rates, and with frequency-agile matching used. Each sheet indicates 2D data for the relevant property in that sheet. Used in Figure 7. Sweep_2D_Fixed.xlsx: Data for the thruster at difference powers and mass flow rates, and with the frequency fixed. Each sheet indicates 2D data for the relevant property in that sheet. Used in Figure 7. Torch_Sweep_mdot_800W.xlsx: Data for the torch at a fixed power of 800 W and different mass flow rates. The columns indicate different system properties. Used in Figure 8. Torch_Sweep_freq_100mgs_800W.xlsx: Data for the torch at a fixed power and mass flow rate of 800 W and 100 mg/s respectively, and different frequencies. The columns indicate different system properties. Used in Figure 9. Agile_Torch_Sweep_mdot_800W.xlsx: Data for the torch at a fixed power of 800 W and different mass flow rates, and with frequency-agile matching used. The columns indicate different system properties. Used in Figure 10. Agile_Torch_Sweep_mdot_800W_Fixed.xlsx: Data for the torch at a fixed power of 800 W and different mass flow rates, and with the frequency fixed. The columns indicate different system properties. Used in Figure 10. Torch_Sweep_2D.xlsx: Data for the torch at difference powers and mass flow rates, and with frequency-agile matching used. Each sheet indicates 2D data for the relevant property in that sheet. Used in Figure 11. Torch_Sweep_2D_Fixed.xlsx: Data for the torch at difference powers and mass flow rates, and with the frequency fixed. Each sheet indicates 2D data for the relevant property in that sheet. Used in Figure 11.