Data accompanying the publication: Investigation of coherent Fourier scatterometry as a calibration tool for determination of steep side wall angle and height of a nanostructure

Authors (publication): Anubhav Paul, Jila Rafighdoost, Xiujie Dou, Silvania F. Pereira <br>This dataset contains the MATLAB scripts and supporting data used to reproduce the main simulation, calibration, sensitivity, and validation results in the publication “Investigation of coherent Fourier scatterometry as a calibration tool for determination of steep side wall angle and height of a nanostructure”. It includes simulated normalized far-field cross-sections (ky = 0 plane) for cliff-like nanostructures under TE/TM illumination for multiple side-wall angles and heights, the corresponding calibration-curve data (based on the “visibility” metric), and sensitivity-analysis datasets (e.g., edge roundness and structure position). The dataset also provides experimental/simulated profile comparisons and AFM-derived statistics used for experimental verification.