Optical and femtosecond laser-induced damage-related properties of Ta2O5-based oxide mixtures

In this study, four Ta2O5-based mixture coatings, including Ta2O5-TiO2, Ta2O5-HfO2, Ta2O5-Al2O3, and Ta2O5-SiO2, are deposited via plasma-ion-assisted electron-beam co-evaporation and compared with a Ta2O5 monolayer coating. The chemical compositions, microstructures, and optical and femtosecond laser-induced damage threshold (LIDT) properties of the coatings are investigated.The data in the figures are detailed in the attachment.