Experimental data of the paper: Nanoscale characterization of stress in Si nanowires for semiconductor qubit fabrication
收藏DataCite Commons2026-02-25 更新2026-05-07 收录
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https://uvadoc.uva.es/handle/10324/83047
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资源简介：
Raw data of the paper: Nanoscale characterization of stress in Si nanowires for semiconductor qubit fabrication.
Subfolder Free-standing_SiNWs: contains the raw data of the measurements taken along the free-standing Si nanowires and the temperature calibration.
Subfolder SiNWs_with_substrate: contains the raw data of the measurements taken along the Si nanowires with the substrate in the samples C4F2 and C4F10.
提供机构：
Universidad de Valladolid, GdS-Optronlab
创建时间：
2026-02-25
