25 nm X-ray nanodiffraction mapping of residual strain distributions at the c...
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Functional properties of power MOSFETs depend decisively on residual strain fields across near-surface transistor cross-sections, which are accumulated during multiple...
功率金属氧化物半导体场效应晶体管(power MOSFETs)的功能特性,决定性地取决于晶体管近表面截面内的残余应变场(residual strain fields),此类应变场是在多轮……过程中累积形成的



