Data for "Non-contact and nanometer-scale measurement of PN junction depth buried in Si wafers using terahertz emission spectroscopy"

Name: Data for "Non-contact and nanometer-scale measurement of PN junction depth buried in Si wafers using terahertz emission spectroscopy"
Creator: figshare
Published: 2025-05-27 03:15:13
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DataCite Commons2025-05-27 更新2025-09-08 收录

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https://figshare.com/articles/dataset/Data_for_Non-contact_and_nanometer-scale_measurement_of_PN_junction_depth_buried_in_Si_wafers_using_terahertz_emission_spectroscopy_/28766750

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资源简介：

Data set for paper titled "Non-contact and nanometer-scale measurement of PN junction depth buried in Si wafers using terahertz emission spectroscopy"

提供机构：

figshare

创建时间：

2025-04-10