Raw kikuchi patterns and EDS elemental mapping data for multi-modal data-driven microstructure characterization
收藏资源简介:
All Kikuchi patterns were captured in a MIRA 3 scanning electron microscope (SEM) by Tescan Orsay Holding, equipped with a field emission cathode. The sample preparation involved mechanical grinding of the newly exposed cross-sectional surfaces using SiC abrasive papers from 800 up to 4000 grit, followed by polishing with 3 μm and 1 μm diamond suspensions. The final step consisted of polishing with an oxide polishing suspension (OPS) for 5-10 min to remove the remaining surface deformation and obtain a surface quality suitable for high-quality Kikuchi patterns, after which the specimen surface was briefly cleaned with ethanol prior to Electron backscatter diffraction (EBSD)/ Energy-dispersive X-ray Spectrometry (EDS) acquisition.The EBSD dataset was obtained with a Nordlys Nano Detector coupled with the AZtec software package by Oxford Instruments. The specimen was tilted 70◦ and the following microscope settings were employed: acceleration voltage of 15 kV, working distance of 17 mm, beam diameter of 72 nm. The measurement covered an area of 13 × 6 μm2 (495 × 266 scan points) of the hematite pellet resulting in a step size of 0.0263 μm. All electron backscatter Kikuchi patterns (EBSPs) were collected with an acquisition time of 0.0448 s and 2 × 2 pixels binning in the CCD sensor, ultimately resulting in an image 672 by 512 pixels. These were saved as TIFF files for each individual sample point. For data sharing and repository upload, these TIFF files were converted to JPEG format without modifying their pixel dimensions or intensity range, except for the inherent file-size compression characteristic of JPEG encoding. In addition, EDS data were acquired simultaneously under the same scanning conditions using an XMax 50 detector (Oxford Instruments). The dataset here is used in the paper: Multi-modal data-driven microstructure characterization.



