Data of inner-shell characteristic X-ray yields for thick Ag, Zr, Mo and W targets by 5-30 keV electrons

The dataset presented here is supplemental material for our papers that are published in Radiation Physics and Chemistry 107 (2015) 47-53 by J.L. Zhao, et al and in Nuclear Instruments and Methods in Physics Research B 333 (2014) 106-112 by X.L. Li, et al. The dataset includes our measured inner-shell characteristic X-ray yields for thick Ag, Zr, Mo and W targets by 5-30 keV electron impact. The surfaces of these (semi-infinite) thick targets were polished. The incident electron beam bombarded vertically, and the thick targets were tilted by 45 degrees with respect to the direction of incident electron beam. The X-ray detector was placed horizontally, and the centers of the target and the detector are located in the same horizontal line. Therefore, the X-ray emission angle is 90 degrees with respect to the incident beam direction.