Data supporting the paper: Mechanical dissipation by substrate-mode coupling in SiN resonators

Data supporting the paper "Mechanical dissipation by substrate-mode coupling in SiN resonators" of M.H.J. de Jong, Malte A. ten Wolde, A. Cupertino, S. Gröblacher, Peter G. Steeneken and Richard A. Norte. This zip file contains the individual figures of the publication, the (analyzed) data plotted in those figures and several (example) raw datasets. Also contained are the measurement and analysis scripts to obtain the raw and analyzed data, and several finite-element simulations as described in the publication. Detailed information is contained in the 'Readme.txt' file within the zip file.<br>

本数据集支撑M.H.J. de Jong、Malte A. ten Wolde、A. Cupertino、S. Gröblacher、Peter G. Steeneken与Richard A. Norte合著的论文《氮化硅（SiN）谐振器中衬底模式耦合引发的机械耗散》（Mechanical dissipation by substrate-mode coupling in SiN resonators）。该压缩包包含该发表论文的独立图表、绘制于这些图表中的（已分析）数据，以及若干（示例）原始数据集。此外还包含用于获取原始数据与分析后数据的测量与分析脚本，以及论文中所述的若干有限元模拟（finite-element simulations）内容。压缩包内的"Readme.txt"文件包含详细说明。