氧化铝陶瓷材料性能数据集
收藏资源简介：
本数据集主要基于大行程氧化铝陶瓷导轨材料组分和配方设计对陶瓷性能的调控研究，以制备出高强度、高模量氧化铝陶瓷材料，作为面板光刻机用大行程氧化铝陶瓷导轨研制材料体系选择的依据，为核心陶瓷部件的研制提供高性能基础材料。主要包含氧化铝陶瓷研制过程中，不同配方、不同制备工艺制备的氧化铝陶瓷的体积密度、弯曲强度、弹性模量、维氏硬度、断裂韧性、热膨胀系数、热导率等力学、热学性能等测试数据，数据量为43.4MB，由项目参与单位中国科学院上海硅酸盐研究所和山东硅元新型材料股份有限公司以及委托的第三方测试机构采用分析天平、万能材料试验机、维氏硬度计、扫描电子显微镜、热膨胀分析仪、激光导热仪等仪器设备测量和采集数据，原始图表有Excel、Word、txt、jpg等格式文件组成，后经Origin、Photoshop和Office等软件整理并绘制完成。
This dataset is developed based on research on the regulation of ceramic performance via composition and formulation design of long-stroke alumina ceramic guide rail materials, aiming to prepare high-strength, high-modulus alumina ceramic materials. It serves as the basis for material system selection in the development of long-stroke alumina ceramic guide rails for flat-panel display lithography machines, and provides high-performance base materials for the development of core ceramic components. It mainly contains test data of mechanical and thermal properties including bulk density, flexural strength, elastic modulus, Vickers hardness, fracture toughness, coefficient of thermal expansion (CTE) and thermal conductivity of alumina ceramics prepared with different formulations and preparation processes during the development of alumina ceramics. The total data volume is 43.4 MB. The data were measured and collected by project collaborators including Shanghai Institute of Ceramics, Chinese Academy of Sciences (SICCAS), Shandong Guiyuan Advanced Materials Co., Ltd., and contracted third-party testing institutions, using instruments and equipment such as analytical balances, universal testing machines, Vickers hardness testers, scanning electron microscopes (SEM), thermal expansion analyzers and laser flash thermal conductivity analyzers. The original data and charts are stored in files in various formats including Excel, Word, txt, JPG, etc., and were subsequently organized and plotted using software such as Origin, Photoshop and Microsoft Office.
